Project TitleBiochemical Electronic Sensors Based on Cascaded Microcantilevers
Track Code2003-072, 2006-117, 2006-130
Short Description

An all-electronic, label- and optics-free bio-chem sensing technology based on Cascaded MOSFET embedded microcantilever.

#sensor #diagnostics #cancer #detection #biosensor #chemical


A promising sensing technology has been developed at Northwestern using label- and optics-free all-electronic approach for wide variety of bio-molecular and chemical detection and diagnosis. Biomedical and other scientific research areas necessitate competent bio-chem sensors, whereas current available devices fail to satisfy this need due to insufficient performance and technology disadvantages, such as large size, low sensitivity and incompatibility with standard CMOS technology. Northwestern’s novel bio-chem sensors overcome these disadvantages by developing cascaded micro-cantilevers with metal-oxide semiconductor field-effect transistors (MOSFET) embedded into the base. Biochemical binding during the sensing process leads to the mechanical deflection of the micro-cantilevers, which can be measured and recorded via MOSFET as drain current signals. This technology offers low-noise, high-sensitivity, direct-readout, and microelectronics-compatible bio-chem sensing for various applications, such as parallel on-chip signal sensing, cancer detection, and remote signaling.

Figure High-performance bio-chem sensors based on MOSFET-embedded microcantilevers. (a): Illustration of bio-chem sensing with MOSFET cantilevers. (b): SEM images of cantilevers displaying embedded MOSFE. (c): Details of MOSFET location on cantilever. (d, e) Schematics of change in a MOSFET drain current due to biochemical binding in sensing process.

TagsSENSOR: biosensor, SENSOR: chemical, DIAGNOSTIC: cancer, DIAGNOSTICS: detection
Posted DateDec 5, 2014 3:07 PM


Gajendra S. Shekhawat*

Vinayak P. Dravid

Arvind K. Srivastava

Soo-Hyun Tark


  • Bio-molecular and chemical sensing
  • Parallel on-chip signal sensing
  • Biomedical diagnostic, such as cancer detection
  • Environment monitoring


  • Label- and optics-free and All-electronic sensing
  • Compact Size
  • Low noise, high cross sensitivity and direct readout
  • Compatibility with proven CMOS engineering platform


IP Status

Issued US patents No. 7,157,897 and No. 7,759,924.

Marketing Contact

Arjan Quist, PhD

Invention Asssociate

(p) 847-467-0305



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