Project TitleA Portable, Benchtop Photolithography System using a Solid State Light Source
Track Code2010-186
Short Description

A new portable technology for solid-state photolithography that utilizes less energy and is more cost-efficient.

#instrumentation #lithography #mems #fabrication #researchtool #equipment #nanotechnology


While photolithography has enabled the development of microelectromechanical systems (MEMS) and other "micro machines", the extremely high-cost of producing such structures has limited further advances. The lab of Teri Odom has addressed these limitations by using GaN-based LEDs in place of inefficient and expensive Hg-vapor lamps for solid-state photolithography. This advance substantially lowers both the up-front cost of the equipment as well as the operational costs associated with maintaining and powering these systems. The Odom group has shown that this benchtop photolithography system can produce patterns as small as 200 nm over 4 in. Si wafers in a single exposure and has already used this technology to create a multitude of patterns and devices.

TagsNANOTECHNOLOGY: fabrication, research tool: equipment, MEMS: fabrication, INSTRUMENTATION: lithography
Posted DateNov 28, 2011 2:41 PM


Teri Odom

Mark Huntington


• Substantially lower costs compared to currently available photolithography systems
• Compact and portable
• Does not require the use of clean-room facilities

• Readily scalable


• Solid-state photolithography
• Nanoscale device fabrication

• Micro- and nanoscale device research


IP Status

A patent application has been filed.

Contact Information

Zach Brown, PhD

Invention Associate

(p) 847-491-4629